DRAMATIC IMPROVEMENTS IN WAVEGUIDE MANUFACTURING WITH FEMTOSECOND LASERS

摘要

1. We have shown that the femtosecond waveguide writing process enables high yield manufacturing of lightwave circuits through: (1) An inherently controllable manufacturing technology; (2) In-situ monitoring and testing; (3) Post manufacturing tuning. 2. Drastically improving on previous work by us and others, waveguide loss per centimeter has reached acceptable limits for integration goals, going below 0.4 dB/cm. 3. The fs waveguide manufacturing process can now be implemented for 3D integrated lightwave circuits. Taking advantage of the three-dimensional capability of the femtosecond process, one can combine the various technique/elements presented here to form highly integrated devices with small footprints and unique specifications.