Optimal Design of PZT actuated Ultrasonic Vibration Mechanism based on Taguchi Method for Precision Laser Machining

摘要

Recently, medical devices are high value added products that requires challenging machining process. In this research, a novel vibration-assisted laser machining mechanism with PZT (Piezoelectric Transducers) is proposed for the fabrication of micro sized holes. If the mechanism vibrates the eyepiece of the laser machining head vertically, the laser spot on the workpiece will move vertically because objective lens in the eyepiece are shaken by the mechanism's vibration. The objective of this research is to get larger amplitude of vibration mechanism under the constraint of high vibrating frequency. Using Taguchi methods, several parameters and factors that deeply affect the performance of the vibration mechanism are optimized. Finally, the requirements of high frequency and large amplitude of the PZT actuated ultrasonic vibration mechanism are achieved, and the deviation error of vibration mechanism is less than 5% of linear motion through experimental verification.