The aim of our work is to detect angular distribution of signal electrons in the back-focal plane of the objective lens in a very low energy SEM (VLESEM) as decsribed in [1]. At this stage we have a prototype of the area-selective directly bombarded detector of electrons based on the CCD. Now we have been testing this detector in a position below the objective lens and near to the optical axis in a cathode lens equipped SEM.
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