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X-RAY STUDY OF BULK MACRODEFECTS IN SILICON

机译:硅散装宏观杂交的X射线研究

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Dislocation-free silicon crystals with a large diameter and with the growth axis [001], which were grown by the Czochralski method in the vacancy mode, have been investigated by the section topography method. The oxygen content was 7x10~(17) cm~(-3). Specimens were subjected to the heat treatment in a neutral atmosphere. Macrodefects with sizes to 1 cm manifesting on the image as the disturbance of the dynamical interference pattern of a perfect crystal have been revealed on experimental topograms. These defects have no kinematical image and are not registered by the methods of projection topography and two-crystal spectrometer. The observed bulk macrodefects are the regions having the refraction coefficient different from the other part of the specimen and represent apparently a stable fluctuation of a microdefect concentration.
机译:通过段的形貌方法研究了通过曲线曲线方法生长的无直径和生长轴的脱位硅晶体。氧含量为7×10〜(17)cm〜(-3)。将标本进行中性气氛中的热处理。由于在实验拓扑图上揭示了在图像上显示为1厘米的大小为1厘米的宏观折杂,作为完美晶体的动态干涉图案的干扰。这些缺陷没有动力学图像,并且没有由投影形貌和双晶光谱仪的方法登记。观察到的体积宏观截面是具有与样本的另一部分不同的折射系数的区域,并且显然是微射线浓度的稳定波动。

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