Micro Processing of Metals Using a High Repetition Rate Femtosecond Laser: from Laser Process Parameter Study to Machining Examples

摘要

The presents a study of laser micro processing of metals by using a high repetition rate femto second laser. On stainless steel (AISI 304), copper and aluminium the impact of the significant laser processing parameters onto the machining process was investigated, such as laser fluence, repetition rate, lateral pulse distance and polarisation. The machining results were evaluated by the ablation rate, surface roughness, process efficiency, material removal rate and the wall-angle. For complementary discussions the experimental data were compared with results achieved in theoretical analysis. Outgoing from the results appropriate laser processing parameters were derived in order to optimise the machining process. With the application of ultra short laser pulses high-quality machining results with a minimal thermal load and a roughness Ra of the laser processed surface of only some hundreds nano meter were obtained. On other hand high machining throughputs were achieved due to application of high repetition rates. Finally, the possibilities and the limits of the high repetition rate femto second laser technology in laser micro processing are demonstrated by means of three-dimensional micro structured machining examples.