In situ determination of work function distribution, composition and chemical features of solid surfaces

摘要

The possibility to determine simultaneously a wide range of the characteristics of solid surfaces is of great importance in studying their electronic properties. In material science, surface physics and emission electronics it is particularly interesting to get at the same time information about elemental composition, chemical state and work function distribution of the surface under investigation. Up to a present, these surface parameters have been determined separately, under non-identical conditions. The composition and chemical state of the surface are usually studied by different kinds of electron spectroscopy, most often - by Auger electron spectroscopy (AES); the absolute value of work function and its relative distribution along the surface are measured by the raster electron-beam method. Both methods allow to determine the local surface parameters mentioned above with practically the same spatial resolution (～100 μm{sup}2).