Klebosol Slurry Compatible with New MagLev Day-Tank Technology

摘要

Klebosol 1501 slurry, an oxide slurry containing colloidal silica abrasive was subjected to a dynamic pump evaluation to determine the long-term slurry stability with new MagLev day-tank technology. Klebosol 1501 was subjected to ～300 day-tank turnovers while monitoring typical slurry health parameters including wafer polishing. Field audits have shown slurry issues from various types of pumps that were continuously recirculating slurry in day-tanks. This leads to the motive behind testing the MagLev day-tank technology. Klebosol 1501 oxide slurry showed no changes in overall normal health parameters after ～300 day-tank turnovers which is ～3× higher than typical fab usage. No settling or thickening was observed at any point in the loop or in the tank. There was no increase in large particle size distribution indicating no particle agglomeration. An actual decrease in the large particle size distribution was observed and has been shown by previous studies (Figure 1). Additional analytical results showed no significant difference. Statistical analysis showed no significant difference on polishing results (removal rate, WIWNU, and defectivity) (Figures 2 & 3). Klebosol 1501 slurry is shown to be compatible with the new MagLev Day-Tank Technology (Figure 4).