In this paper, a novel electrostatically actuated 2×2 fiber optic switch with very low operating voltage is presented. Using stress-induced bending of polysilicon plates, a vertical mirror is raised above the substrate. Electrostatic force isused to attract the mirror to the substrate to switch between the cross and the parallel states of the optical switch. The stress-induced curvature of the polysilicon beam substantially lowers the operating voltage of the switch. Large mirror displacement (300μm) and low operating voltage (20 V) are achieved simultaneously. Submillisecond switching time (<600μsec) and reliable operation (>14 million cycles) have been demonstrated. The insertion loss is measured to be 0.55 CIB and 0.7 dB for single modefibers in the cross and parallel states, respectively.
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