Shape Memory Alloy Compliant Microrobots

摘要

This paper deals with microrobots actuated by shape memory alloys (SMA). The microrobots must often have a complex 3D geometry and must endure large deformations. Then the mechanical structure of the presented microrobots is realized in polymer by microstereophotolithography (#mu#SPL). Different structures, with 2 mm to 700 microns in diameter, have been designed and manufactured, based on elastic pivots and distributed elasticity. Experimental results are given concerning the PID-based motion control of one microrobot. One of our main purposes is the cooperative micromanipulation of micro-objects for micro-assembling tasks. We have developed the impedance model of cooperative microfingers and identified the design parameters needed for the optimization of our prototypes. Our design method is based on a neural bond graph (NBG) approach.