Aspherical form control for X-ray mirror substrates with ELID(Electrolytic In-Process Dressing)-grinding

摘要

X-ray optics has rapidly been advanced and applied to many fields. X-ray mirrors could be one of the most important devices which gives a great influence on the performance of a whole system. X-ray mirrors could require for higher precision than any other parts. But the technique which produces this kind of mirrors has not been established yet. In this paper the applications of the ELID grinding technique[1], which is widely known as a method which produces high precision ground surfaces in a short period of time, are shown for X-ray mirrors.