Thermopile single element IR-sensors are commonly used as radiation sensors. For some applications like detection of position, size and direction of movement however, the measurement of a single spot is not sufficient. THis paper describes the realization of thermopole 3x5 element sensor arrays for low cost applications. Themopile IR-sensor arrays can be used for several security applications (e.g. person detection in rooms or out-of-position surveilla ce of the passenger seat in automotive applications, hot spot detection and temperature measurement). Measurement results on sensitivity and detectivity, optical and thermal resolution (with a suitable IR-optics) and crosstalk between neighobring elements will be presented.
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