MPACVD of GeO/sub 2//SiO/sub 2/ planar waveguide for integrated optics

摘要

Optical communication system requires different functional components for high efficiency and network flexibility. Optical circuits based on low-loss glass waveguide are the practical and promising approaches to integrate both active and passive devices as a single module for fiber interconnection. AMP has acquired from GEC/GPT of U.K. a world-wide exclusive license for technology of microwave plasma assisted chemical vapor deposition (MPACVD) to produce superior quality, low birefringence, low-loss, planar waveguides for integrated optical devices on either silica or silicon substrate.