Nonplanar surface profile measurements systems

摘要

The authors present a nonplanar surface profile measurement method wherein in-plane and out-of-plane coordinates are independently measured using two different techniques, and the data are correlated to give an overall surface profile. The first technique uses computer-controlled optical equipment to determine the in-plane grid locations in an x-y coordinate system. In the other, Moire interferometry is used to determine the out-of-plane depth to give the z-coordinates. The z data are then correlated with the x-y data to define the surface profile. The procedure used is described, along with some preliminary results.