A Novel Low Power Hexagonal Gas Sensor Cell for Multi-Channel Gas Detection

摘要

This paper reports a low power, high sensitive metal oxide gas sensor cell with novel hexagonal structure for multi-channel gas detection. Six sensors are integrated with a hexagonal micro-hotplate to make up the sensor cell. The hexagonal micro-hotplate was designed and fabricated using MEMS technology, and the sensing material SnO2 was directly deposited by sputtering, which shows excellent semiconductor process compatibility. The active region of the sensor cell is 600×520 μm^{2. The sensor cell achieves 6-channel detection of ethanol at one time in a large voltage supply range of 2.0 V to 3.0 V. With an input voltage of 3.0 V (5.85 mW×6), the highest response (Rair/Rgas) of the sensor cell is 16.93 (94.1% sensitive resistance change). The average power consumption of the sensor cell is just 3.03 mW when the sensor cell starts responding to ethanol.}