The 3D manipulation of a microsphere for nano-CMM probe using single fiber optical trapping

摘要

We suggest a novel 3-D probing technique for measuring micro parts which have high aspect ratio such as a groove or a deep-hole. This technique uses the optical force exerted on a dielectric microsphere at the tip of optical fiber so called the fiber optical trapping. A microsphere is trapped at the tip of an optical fiber which has micrometer size of the diameter and sub micrometer size of the tapered tip. The optical source is a Nd:YAG laser with the wavelength of 1064 nm. A fiber optical trapping system is quite similar to a conventional CMM. The roll of a microsphere is the same as the probe sphere of a conventional CMM and an optical fiber works as a stylus shaft. The micro optical fiber part is thinner than the diameter of the microsphere and longer than the depth of shapes such as deep holes and grooves, which enable to make an approach to a steep angle surface of a work piece with high aspect ratio.