Numerical Simulation of ICP source Impedance and Experimental Verification

摘要

Obtaining the equivalent impedance of the Inductively Coupled Plasma (ICP) source driver is very important in the design of impedance matching circuit. For this reason, we built a 3D model in MAXWELL software. The plasma is equivalent to a uniform conductive medium. The electromagnetic field under the condition of 1MHz excitation current is solved. And we calculated the equivalent impedance of the driver by means of vector volume integration. Then we used the potassium chloride (kcl) solution with a certain conductivity to simulate plasma. It was put into the driver and we measured the impedance of the driver. The simulation results and the measurement result were compared and verified.