Fin) enabled by the formation of the'/>
机译:在200 mm GeSnOI衬底上实现了小于10 nm鳍宽的GeSn p-FinFET:最低SS为63 mV /十倍,最高G
Logic gates; Substrates; Temperature measurement; Fabrication; Frequency measurement; Plasma temperature; FinFETs;
机译:Gesn P-FinFet具有亚10 NM翅片宽度,在200mm Gesnoi衬底上实现:63 mV /十年的最低SS,最高G
机译:Si上的垂直Inas / Gaassb / Gasb隧道隧穿场效应晶体管与S = 48 mV /十年,I