A Miniature Lens Scanner with an Electrothermally-Actuated Micro-Stage

摘要

This paper reports the design and characterization of a MEMS lens scanner based on a novel electrothermally-actuated MEMS stage and a planoconvex polymer lens. Cu and W are used in the electrothermal bimorph actuators, replacing previously employed Al and SiO₂to improve the stiffness of the MEMS stage. At the same time, the lens is made of PDMS, greatly reducing the weight compared to glass lenses. The MEMS lens scanner can generate a large vertical movement of over 100 μm at only 5 V, while still keeping its piston resonant frequency as high as 293 Hz. The footprint of this MEMS lens scanner is only 3.8×3.8 mm^2.