Formation of micro-groove on diamond by femtosecond laser micromachining

摘要

Laser processing of diamond have attracted attention. Ultrashort laser pulses can be used for micro-structuring ondiamond and in bulk diamond. In this paper, we report on laser parameters for surface structuring of diamond by usingfemtosecond laser pluses at a repetition rate of 1 kHz. By changing scanning speed and energy, different types ofgrooves were inscribed. The morphology and depth of grooves were investigated.