Application of Biocompatible Organic/Inorganic Composite Film in Implantable Retinal Prosthesis

摘要

Although many groups worldwide have spent a lot of effort on developing devices for retinal prosthesis to restore blind eyesight, current technologies still lack of a reliable implantable packaging solution for high-density feedthroughs. Here, we propose the fabrication and latest testing results for a novel five-layer organic/inorganic film package sample, the organic parylene-C (PA) was deposited using chemical vapor deposition (CVD) and the inorganic aluminum oxide (Al₂O₃) film was deposited using atomic layer deposition (ALD) method. The final sample has passed through the He leakage, bio-compatible level test and the active soaking test, indicated its life time last for years.