Integrated sensor and electronics processing for >10^8 'iMEMS' inertial measurement unit components

摘要

There is often a large gap between theory and practice in electronics. Making one of a "device" in a lab is a far cry from turning out 10's of millions. For a technology to succeed both must happen. This paper addresses the latter discipline. Presented are selected details on the processes and products involved in commercially producing over 120 million integrated MEMS inertial measurement devices, i.e., accelerometers and gyroscopes.