Two-photon absorption polymerization (2PP) is a versatile lithographic method for building three-dimensionalmicrodevices with sub-diffraction resolution and tunable elasticity. Using 2PP of organo-ceramic hybrid OrmoComp(trimethylolpropane triacrylate), we prepared microsized polymeric cantilevers consisting of the surface-anchoredmicropillar, long elastic neck and spherical head. A typical microcantilever has the length of 30 micrometers andthickness of 1-2 micrometers. To investigate the mechanical properties of our elastic microcantilever, we applied a laseroptical trapping force on the head of the cantilever and bent the head from its equilibrium position. After switching offthe laser trap, the head returns to the equilibrium position. The time-dependent restoring trajectory of the head wasrecorded by a fast video-tracking technique (500 fps) and subjected to the custom-made drift-correcting image analysis.We find that the microcantilever relaxation process is well-described by a single-exponential relaxation curve with atime constant of 16.5 1.2 ms. Assuming a highly overdamped regime, theoretical calculations yielded an apparentYoung´s modulus for our OrmoComp microstructure of 1 Mpa, which is 3-orders of magnitude smaller than thereported value for the bulk material (1 Gpa). The possible reasons for such discrepancy are discussed.
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