Direct monochromatic optic control system of the thickness of thinfilm interference coatings applied in vacuum

摘要

The principle of construction and design of the optical control system of the thickness of thin-film interference coatingsapplied in vacuum with the low-cost realization has been developed. The optical control system is built on the principleof measurement directly on the product - direct control at one wavelength (monochromatic). Model, allowing to evaluatetechnical capabilities of introduced system was made.