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Large area metasurface lenses in the NIR region

机译:近红外区域的大面积超表面镜片

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摘要

Metasurfaces have revolutionized the definition of compact optics. Using subwavelength periodic structures ofnanostructured dielectrics, the refractive index and absorption properties of metasurfaces – which are 2D metamaterials –can manipulate light to a degree not possible with conventional bulk glasses and crystals. The phase, polarization, spin(for circularly polarized light), amplitude and wavelength of light can all be manipulated and crafted to user-specifiedvalues to mimic the action of a lens, which we refer to as a metalens (ML). MLs have four major advantages overtraditional refractive lenses – superior resolution, lighter weight, miniaturization and cost. Many metasurfaces withuseful functionalities have been proposed in recent years, yet although novel in their approach have few real-worldapplications. One such market is the use within infrared laser systems, such as laser designators. In this work, wedemonstrate metasurface lenses working at a wavelength of λ = 1064 nm, with aperture d = 1 mm and four different Fnumbers(focal length f = 0.5, 1, 2 and 5 mm). The lenses are composed of 700nm high a-Si pillars – ranging from 70-360 nm diameter – which are fabricated using electron beam lithography (EBL) and reactive ion etching processes, ontop of a fused silica substrate. Such lenses are shown to have diffraction-limited performance, with focal spot-sizeagreeing with theoretical values of λ‧f/d. Furthermore, we have designed large area lenses with aperture d = 10 mm,where the number of pillars per lens exceeds 550 million. By using an efficient Python script, we are able to producethese 100 mm~2 samples with just 14 hours of EBL writing time.
机译:超表面彻底改变了紧凑光学的定义。使用亚波长周期结构 纳米结构介电质,超表面的折射率和吸收特性–是2D超材料– 可以将光控制到常规大块玻璃和晶体无法达到的程度。相位,极化,自旋 (对于圆偏振光),光的振幅和波长都可以根据用户指定的方式进行操纵和制作 值,以模仿镜头的作用,我们将其称为金属元素(ML)。与机器学习相比,机器学习有四个主要优势 传统的屈光镜片–更高的分辨率,更轻的重量,更小的尺寸和更高的成本。许多具有 近年来已经提出了有用的功能,尽管其方法新颖,但实际情况却很少 应用程序。这样的市场之一是在红外激光系统中的使用,例如激光指示器。在这项工作中,我们 演示工作在λ= 1064 nm,孔径d = 1 mm和四个不同的F数的超表面透镜 (焦距f = 0.5、1、2和5毫米)。镜头由700nm高的a-Si柱组成,范围从70- 直径为360 nm –使用电子束光刻(EBL)和反应性离子蚀刻工艺制造, 熔融石英基板的顶部。这样的透镜显示出有限的衍射性能,焦斑大小 与λ‧f/ d的理论值一致。此外,我们设计了孔径d = 10 mm的大面积镜头, 每个镜头的柱子数量超过5.5亿。通过使用高效的Python脚本,我们能够产生 这些100 mm〜2的样本仅用了14个小时的EBL写入时间。

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