High-precision High-speed and Noninvasive Optic Distance　Measurement

摘要

In all kinds of optical applications, the precision of central optical distance has significant influence on thedesired imaging properties according to the optical design requirements. In this paper, we present a measurement methodfor the determination of the central distance both in assembled systems and single-lens with high precision, high speed andnon-invasive characters. The distance between optical surfaces are optically measured by the mean of swept source domaininterferometric system. A fiber-optics system with a central wavelength 1310 nm is built, the central distances of allsurfaces within coherence length can be quickly measured at the same time. The system pixel resolution is about 0.1μmcalibrated by Mitutoyo standard level-zero gauge and calculated by Fast Fourier Transform (FFT) and zero-paddingalgorithm. System precision double checked by other gauges is less than 0.3μm. The standard gauge-sets and a lens weremeasured by this system, the result also verified the high precision. The systematic error is less than 0.3μm and thesensitivity is about 22μm experimentally. The high speed swept light source (100kHz used in system) ensures the quickmeasuring speed. This measurement method has high precision, high speed, non-invasive and high sensitivity characters,and can be applied in related optical system.