Over the last few years, there has been a rapid growth inMicroelectro-Mechanical Systems (MEMS) technologies, on boardintelligent technologies and smaller, faster, and smarter wirelesstelemetry systems technologies that can reduce cycle time and totalmeasurement and test process cost. The major attraction of MEMStechnology is the order of magnitude reduction of the power and thermalrequirements over existing electronic components. In addition, the sizeand power requirements have also made them attractive for wind tunneltests, field-deployable acoustic measurement systems, flight, and spaceapplications. Recent advances in MEMS technology have made it possibleto produce pressure, acceleration, humidity, and temperature sensorshaving masses in the milligram range or even lighter.In this paper,characteristics of MEMS devices for propulsion systems, meteorologicalinstrumentation, and space applications are presented
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