A2. controlling ESD in the modern cleanroom manufacturing environment (cleanrooms / ESD / ionization guidelines and considerations)

摘要

As devices become faster and feature sizes decrease, sensitivities to ESD and contamination increase. This workshop will focus on the roles that grounding methods, materials, cleanrooms and ionization play in controlling ESD and contamination in the modern cleanroom manufacturing environment. Several industry experts will share their experiences and will answer questions related to current ESD and Contamination control issues, such as selecting ESD and cleanroom safe materials, electrostatic attraction, the use of ionization and various other related topics.