Detailed characterization of a hyperspectral snapshot imager for full-field chromatic confocal microscopy

摘要

Hyperspectral imaging opens a wide field of applications. It is a well established technique in agriculture, medicine, mineralogy and many other fields. Most commercial hyperspectral sensors are able to record spectral information along one spatial dimension in a single acquisition. For the second spatial dimension a scan is required. Beside those systems there is a novel technique allowing to sense a two dimensional scene and its spectral information within one shot. This increases the speed of hyperspectral imaging, which is interesting for metrology tasks under rough environmental conditions. In this article we present a detailed characterization of such a snapshot sensor for later use in a snapshot full field chromatic confocal system. The sensor (Ximea MQ022IIG-IM-SM5X5-NIR) is based on the so called snapshot mosaic technique, which offers 25 bands mapped to one so called macro pixel. The different bands are realized by a spatially repeating pattern of Fabry-Perot filters. Those filters are monolithically fabricated on the camera chip.