Dielectric Response and Charge Injection Behavior for Cu/PMMA/Pt and Cu/PMMA-Si

摘要

Metal - Insulator - Metal (MIM) and Metal - Insulator- Semiconductor (MIS) capacitors were fabricated by spin coating poly (methyl methacrylate) (PMMA) as the insulating material. Here, we consider the effect of dissimilar contact electrodes systems (Cu/Pt and Cu-Si) on the dielectric and electrical response. From the frequency- and temperature- dependent dielectric measurements, it was found that Cu/PMMA-Si interface has an additional contribution that affects the dielectric properties. Activation energies obtained from the ohmic conduction in forward bias showed a higher value in activation energy for Cu/PMMA-Si compared to that for Cu/PMMA/Pt, demonstrating the possible contribution of interfacial regions. Further experiments under reverse bias were carried out to study the importance of polarization in the electrical response.