Two-Dimensional van der Waals Heterostructure Tunneling Photodiodes on Silicon Nitride Waveguides

摘要

We fabricated h-BN/MoS₂/graphene van der Waals heterostructures on silicon nitride waveguides for use as high-speed infrared tunnel photodiodes. We measured 28-GHz bandwidth, 0.24-A/W responsivity, and on/off ratio larger than 10,000.