Process Design Kit and Design Automation for Flexible Hybrid Electronics

摘要

High-performance low-cost flexible hybrid electronics (FHE) are desirable for internet of things (IoT). Carbon-nanotube (CNT) thin-film transistor (TFT) is a promising candidate for high-performance FHE because of its high carrier mobility (25cm²/V.s), superior mechanical flexibility/stretchability, and material compatibility with low-cost printing and solution processes. Flexible sensors and peripheral CNT-TFT circuits, such as decoders, drivers and sense amplifiers, can be printed and integrated with thinned (<;50μm) silicon chips on soft, thin, and flexible substrates for appealing product designs and form factors. Here we report: 1) process design kit (PDK) to enable FHE design automation, from device modeling to physical verification, and 2) open-source and solution-process proven intellectual property (IP) blocks, including Pseudo-CMOS [1] digital logic and analog amplifiers on flexible substrates, as shown in Figure 1. The proposed FHE-PDK and circuit design IP are fully compatible with silicon design EDA tools, and can be readily used for co-design with both CNT-TFT circuits and silicon chips.