A Path Optimization Compression Algorithm for Layout Partitioning in OPC

摘要

Optimization of the path planning algorithms is an important direction in many research fields, such as robot and map. In this paper, a noval graph lossless compression method is presented for layout partitioning to shorten the time for path planning. This compression algorithm is designed for layout files, based on polygons in each layer of the layout. It can be loaded on various path search algorithms and optimization methods to find a path bypassing polygons between two points as a cutting line. The proposed algorithm not only improves the partition efficiency significantly, but also makes it easier to restore the layouts. Then the small irregular partitioned patterns can be used for next layout operation: Optical Proximity Correction(OPC).