Ex situ metrology and data processing techniques developed at the ALS for optimization of beamline performance of bendable x-ray mirrors

摘要

We discuss experimental, analytical, and numerical methods recently developed at the Advanced Light Source (ALS) X-Ray Optics Laboratory (XROL) for calibration and precision shaping of bendable x-ray mirrors. The methods are based on ex situ measurements with the mirrors using surface slope profilers available at the ALS XROL. The first realization of methods and dedicated software has allowed the optimization of the beamline performance of bendable mirrors by adjustment of the mirror shape to minimize the root-mean-square variation of residual (after subtraction of the ideal desired shape) slope deviations from ideal (specified) surface figure. Here, we further develop the methods that in application to elliptically bent mirrors adapt as a figure of merit the minimum of the rms size of the focused beam. The efficacy of the developed methods is demonstrated with examples of optimal tuning of an elliptically bendable cylindrical mirror designed for the ALS beamline 10.3.2.