We the tool for measurement of the stress in Generation 6 Flat Panel Displays (G6 FPD) and larger by observing the distortion of image of the light emitting device pattern reflected in the substrate. The observed topography is used to calculate stress in film. The metrology does not involve any moving parts. Tool has repeatability and accuracy of the order of 5 MPa for the glass and film thickness of 0.7 mm, and 5 urn respectively. The measurement time is smaller than 100 s. Tool does is fully compatible with standard robot based glass handling technology.
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