Comparative Analysis of Measurement Methods for Assessing the Complex-Deformed State of the Elements of Microelectronic Equipment Made of Elastic Materials

摘要

The article discusses possible methods for measuring internal force factors in elements of microelectronic equipment made of elastic materials, using the example of a flexible wheel of harmonic drive, evaluates their positive and negative sides, discusses problems associated with measuring the deformations of elastic materials, and concludes that it is reasonable to use another measurement method.