Design and fabrication of deformable mirror driven by piezoelectric buzzer array

摘要

A low-cost deformable mirror (DM) driven by an underlying piezoelectric buzzer array though connection struts is proposed. Piezoelectric buzzer is a very low cost device that is easily commercial available. A numerical model of piezoelectric buzzer was built to predict the displacement of the actuator. The fabrication process without complicated technology was developed. Finally, a DM with 19 actuators arranged hexagonally was fabricated.