Uncertainty Analysis of Distortion Measurement of Laser Differential Confocal by Different Evaluation Methods

摘要

The focal length is one of the important parameters in the optical element, and the high precision measurement of the focal length has become a key problem in the processing and use of the optical element. The laser differential confocal length measurement system is introduced, and the uncertainty of the two sets of focal length measurement is evaluated. The relative error (K = 2) is better than 4.77 X 10~(-5), and the relative error is 0.00025%.