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Thin-film optical pass band filters based on new photo-lithographic process for CaSSIS FPA detector on Exomars TGO mission: development, integration and test

机译:基于新型光刻工艺的薄膜光学通带滤波器,用于Exomars TGO任务中的CaSSIS FPA检测器:开发,集成和测试

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A new technique based on photolithographic processes of thin-film optical pass band coatings on a monolithic substrate has been applied to the filters of the Focal Plane Assembly (FPA) of the Colour and Stereo Surface Imaging System (CaSSIS) that will fly onboard of the ExoMars Trace Gas Orbiter to be launched in March 2016 by ESA. The FPA including is one of the spare components of the Simbio-Sys instrument of the Italian Space Agency (ASI) that will fly on ESA's Bepi Colombo mission to Mercury. The detector, developed by Raytheon Vision Systems, is a 2kx2k hybrid Si-PIN array with a 10 μm pixel. The detector is housed within a block and has filters deposited directly on the entrance window. The window is a 1 mm thick monolithic plate of fused silica. The Filter Strip Assembly (FSA) is produced by Optics Balzers Jena GmbH and integrated on the focal plane by Leonardo-Finmeccanica SpA (under TAS-I responsibility). It is based on dielectric multilayer interference coatings, 4 colour bands selected with average in-band transmission greater than 95 percent within wavelength range (400-1100 nm), giving multispectral images on the same detector and thus allows CaSSIS to operate in push-frame mode. The Field of View (FOV) of each colour band on the detector is surrounded by a mask of low reflective chromium (LRC), which also provides with the straylight suppression required (an out-of-band transmission of less than 10~(-5)m). The mask has been shown to deal effectively with cross-talk from multiple reflections between the detector surface and the filter. This paper shows the manufacturing and optical properties of the FSA filters and the FPA preliminary on-ground calibration results.
机译:一种基于单片基板上薄膜光学通带涂层光刻工艺的新技术已应用于彩色和立体表面成像系统(CaSSIS)的焦平面组件(FPA)的滤光片上,该滤光片将在ExoMars微量气体轨道飞行器将于2016年3月由ESA发射。 FPA包括意大利航天局(ASI)的Simbio-Sys仪器的备用组件之一,该仪器将在ESA的Bepi Colombo飞往水星的飞行中飞行。由雷神视觉系统公司开发的探测器是一个2kx2k混合Si-PIN阵列,像素为10μm。该检测器位于一个块内,并具有直接沉积在入射窗上的滤光片。窗口是一块1毫米厚的熔融石英整体板。滤光片组件(FSA)由Optics Balzers Jena GmbH生产,并由Leonardo-Finmeccanica SpA(由TAS-I负责)集成在焦平面上。它基于介电多层干涉涂层,在波长范围(400-1100 nm)内选择了4个色带,平均带内透射率大于95%,可在同一检测器上提供多光谱图像,从而使CaSSIS可在推框式操作模式。检测器上每个色带的视场(FOV)都被低反射铬(LRC)罩所包围,该罩还提供了所需的杂散抑制(带外传输小于10〜(- 5)/ nm)。已经证明该掩模可以有效地处理检测器表面和滤光片之间多次反射产生的串扰。本文显示了FSA滤光片的制造和光学特性,以及FPA的初步地面校准结果。

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