Fabrication of transmissive plasmonic color filters with built-in Si photodiodes

摘要

Transmissive color filters (CFs) with a function of photoelectric conversion were proposed. They consisted of amorphous silicon p-i-n structures embedded in metal-insulator-metal (MIM) metamaterials. We successfully demonstrated to produce several transmissive colors and photo current under white light illumination. Wavelength selectivity and current-voltage characteristics of fabricated CFs were experimentally investigated. The CFs are expected to be applied to imaging and sensor devices and energy conversion systems.