Tunable microwave phase shifter with low RF-power variation based on high-Q epitaxial AlN ring resonator

摘要

A novel optically tunable microwave phase shifter is demonstrated based on high-Q (intrinsic quality factor ~ 3.3×106) epitaxial AlN microring, exhibiting a tuning range of 0-332° and RF-power variation less than 3 dB for a 19 GHz signal.