Zero dimensional model of atmospheric SMD discharge and afterglow in humid air

摘要

Summary form only given. Multiple time-scaled zero-dimensional models are used to simulate the time resolved number densities of multiple reactive oxygen and nitrogen species(RONs), including O3, NO2, NO3, N2O, N2O5, H2O2, HNO2 and HNO3, in a humid air plasma process at atmospheric pressure. Simulated is a total of 26 ionic species, electrons and 26 neutral species including multiple excited states. From the local Electron Energy Distribution Function (EEDF) the mean electron energy is determined and used in various reaction rate coefficients. A total of 624 reactions between the 53 species are simulated in two interdependent zero-dimensional models that differ in nine orders magnitude in temporal resolution, thereby reducing the computational load that is traditionally required in a complex system. A single homogenous volumetric discharge generated by a Surface Micro Discharge(SMD) setup is simulated. Through control variables, parameters such as: ignition frequency, deposited power density, duty cycle, discharge size, and humidity level will be varied in order to predict ideal operating conditions for appropriate SMD devices. The described model has been verified by matching simulation parameters and comparing results to that of previous works1 as well as matching current operating conditions and comparing to the measurements of an experimental mesh-like SMD.