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A numerical approach for simulations of the mode propagation in a microwave driven plasma discharge

机译:一种模拟微波驱动等离子体放电中模式传播的数值方法

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The market shows in recent years a growing demand for bottles made of polyethylene terephthalate (PET). Therefore, fast and efficient sterilization processes as well as barrier coatings to decrease gas permeation are required. A specialized microwave plasma source — referred to as the plasmaline — has been developed to allow for depositing thin films of e.g. silicon oxid on the inner surface of such PET bottles. The plasmaline is a coaxial waveguide combined with a gas-inlet which is inserted into the empty bottle and initiates a reactive plasma. To optimize and control the different surface processes, it is essential to fully understand the microwave power coupling to the plasma and the related heating of electrons inside the bottle and thus the electromagnetic wave propagation along the plasmaline. In this contribution, we present a detailed dispersion analysis based on a numerical approach. We study how modes of guided waves are propagating under different conditions, if at all.
机译:近年来,市场表明,对聚对苯二甲酸乙二醇酯(PET)制成的瓶子的需求不断增长。因此,需要快速有效的灭菌工艺以及减少气体渗透的阻隔涂层。已经开发出一种专门的微波等离子体源,称为等离子线,以允许沉积例如三氧化二铝的薄膜。这种PET瓶内表面上的氧化硅。等离子线是一个同轴波导,与一个进气孔组合,该进气孔被插入空瓶中并引发反应性等离子体。为了优化和控制不同的表面过程,必须充分了解与等离子体耦合的微波功率以及瓶内电子的相关加热,以及由此产生的电磁波沿等离子体线的传播。在这一贡献中,我们提出了一种基于数值方法的详细色散分析。我们研究导波模式在不同条件下(如果有的话)如何传播。

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