Growth prediction method for new biocompatible piezoelectric thin films

摘要

We have focused on MgSiO (Magnesium Silicate) which is a new biocompatible piezoelectric material having large spontaneous polarization. Then, crystal thin film growth prediction method was improved in order to predict growth orientation of the non-preferred orientation direction. Calculated total energy in each orientation of distorted crystal by the buffer layer was compared to the value in the stable structure. Total energy difference between the stable state and each crystal orientation pattern showed a trend similar to that of the X-ray peak intensity. Then, energy difference needed to be below 0.001 eV for crystal to be grown.