Surface pretreatments by 1, 2-Bis(triethoxysilyl) ethane (BTSE), 1.2-bis [triethoxysilylpropyl]amine (BTSPA), and 1.2-bis [triethoxysilyl]tetrasulfide (BTSPS) were evaluated from the viewpoint of improving corrosion resistance of a thin cobalt film. These silane-coupling layers are formed on cobalt oxide by immersion in a pretreatment solution including hydrogen peroxide. Immersions in BTSE and BTSPA pretreatment solutions were found to significantly improve corrosion resistance of the cobalt film. When the former (BTSE) pretreatment solution was applied, the corrosion resistance improved with pretreatment time; however, adversely, when the latter pretreatment was applied, corrosion resistance deteriorated with pretreatment time. On the other hand, the corrosion was not inhibited by the immersion in BTAPS pretreatment solution. These behaviors are explained by applying in terms of the hard and soft acid-base (HSAB) principle.
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