Absolute scale-based imaging position encoder with submicron accuracy

摘要

Study is devoted to experimental research and development of absolute imaging position encoder based on standard calibrated scale of invar alloy with 1 mm spacing. The encoder uses designed imaging system as a vernier and absolute magnetic encoder as a rough indication. The features of optical design, choice and use of imaging system as long as indexes images processing algorithm are described. A shadow method was implemented: indexes images on a CCD array are formed by the lens focused at the scale surface; the laser module lights up the scale through a beam-splitting prism by a parallel beam. Further dark indexes images on a light scale background are detected and analyzed to estimate the encoder position. Full range of experimental tests was set to calibrate the encoder and to estimate the accuracy. As a result, accuracy close to 1 urn at 1 m was achieved.