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Modeling complex processability constraints in high-mix semiconductor manufacturing

机译:在高混合半导体制造中建模复杂的可加工性约束

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In semiconductor high-mix fabs, several technology nodes are run on the same line, using tool types from different generations. In this context, processability is a function defining which products can be processed on a given machine considering the current status of both the product and the machine. So in a high-mix context, having an information system that provides reliable information on processability and that can support the evolution of processability rules is fundamental. In this paper, we analyze the key elements for such a system. Based on the example of the implementation of fab constraints at STMicroelectronics' Crolles300 production unit, we illustrate the consequences of the integration of new processability rules and propose flexible and agile UML class diagrams enabling information system to meet evolution requirements. The approach is validated on real fab data, and its impact is discussed.
机译:在半导体高混合Fab上,使用来自不同几代的刀具类型在相同线上运行几个技术节点。在这种情况下,可加工性是定义在考虑产品和机器的当前状态的给定计算机上处​​理哪些产品的函数。因此,在一个高混合背景下,具有提供有关可加工性的可靠信息的信息系统,并且可以支持可加工性规则的演变是至关重要的。在本文中,我们分析了这种系统的关键元素。基于STMicroelectronics Crolles300生产单元的FAB限制的实施例,我们说明了新的可加工性规则集成的后果,并提出了灵活和敏捷UML类图,使信息系统能够满足演化要求。该方法在真正的Fab数据上验证,并讨论了其影响。

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