The multipole resonance probe: Evolution of a plasma sensor

摘要

A robust and sensitive plasma probe, the multipole resonance probe (MRP), and its importance for industrial purposes is presented and discussed in this paper. Based on its innovative concept and its simple model of the system ”probe-plasma”, a novel wall-mounted sensor is introduced. This sensor represents an optimized design of one sector of the MRP's assembly and is investigated within 3D-electromagnetic field simulations and compared to measurements of the MRP in an argon plasma. The resulting wall-mounted sensor can be designed for a desired application, which operates within a limited frequency range. The presented sensor covers a density range of approximately ne = 1016 m−3… 1017 m−3, which is sufficient for the considered process.