An electrically tunable MEMS based out-of-plane metamaterials THz filter using stress-induced curved cantilevers to form split-ring resonator in three-dimensional configuration is experimentally demonstrated and characterized. While the achieved tunable range for the resonant frequency is 0.5 THz at 20 volts bias, quality factor of the resonant frequency is improved as well. This MEMS based THz filter using curved cantilevers shows its potential in tunable metamaterials applications such as sensors, optical switches, and filters, etc.
展开▼
