首页> 外文会议>IEEE Photonics Conference >A Patternable, Anti-Reflective Light Blocking Layer using a Nano-Particle Suspension in Photoresist

【24h】

A Patternable, Anti-Reflective Light Blocking Layer using a Nano-Particle Suspension in Photoresist

机译：使用在光致抗蚀剂中的纳米颗粒悬浮液的可图案化的抗反射遮光层

获取原文

页面导航

摘要
著录项
相似文献
相关主题

摘要

This paper presents a method for fabricating a broadband anti-reflective light blocking layer patternable on a micron scale using standard photolithography using a combination of photoresist and Al₂O₃ nanoparticles over an aluminum layer.

机译：本文介绍了一种使用光致抗蚀剂和Al的组合使用标准光刻在微米级上制造宽带抗反射遮光层的方法。_{2 O._{3 纳米粒子在铝层上。}}

著录项

来源
《IEEE Photonics Conference》|2018年|606p|共2页
会议地点
作者
Matthew Hamblin; Thane Downing; Sophia Anderson; Aaron Hawkins; Holger Schmidt;
展开▼
作者单位

展开▼
会议组织
原文格式 PDF
正文语种
中图分类 TN2-53;
关键词
Reflectivity; Nanoparticles; Resists; Scattering; Aluminum; Electrical engineering; Standards;

机译：反射率;纳米粒子;抗蚀剂;散射;铝;电气工程;标准;

相似文献

外文文献
中文文献
专利

1. Broadband antireflective light-blocking layer using nanoparticle suspension in photoresist with high-resolution patterning [J] . Matthew Hamblin, Thane Downing, Sophia Anderson, Journal of microanolithography, MEMS, and MOEMS . 2019,第1期

机译：在高分辨率光刻胶中使用纳米粒子悬浮液的宽带抗反射阻光层
2. Black Photoresist for Patterning Pixel Define Layer of Organic Light Emitting Diode with Polyimide as Thermal Stabilizer [J] . Genggongwo Shi, Jin Woo Park, Lee Soon Park Materials Sciences and Applications . 2018,第6期

机译：黑色光阻剂，用于图案化像素，以聚酰亚胺为热稳定剂，定义有机发光二极管的层
3. Laser lift-off transfer printing of patterned GaN light-emitting diodes from sapphire to flexible substrates using a Cr/Au laser blocking layer [J] . Jaeyi Chun, Youngkyu Hwang, Yong-Seok Choi Scripta materialia . 2014,第Null期

机译：使用Cr / Au激光阻挡层从蓝宝石到柔性衬底的图案化GaN发光二极管的激光剥离转移印刷
4. A Patternable, Anti-Reflective Light Blocking Layer using a Nano-Particle Suspension in Photoresist [C] . Matthew Hamblin, Thane Downing, Sophia Anderson, IEEE Photonics Conference . 2018

机译：使用光刻胶中的纳米颗粒悬浮液形成可图案化的抗反射光阻挡层
5. Enhanced luminous efficiency and brightness using DNA electron blocking layers in bio-organic light emitting diodes. [D] . Hagen, Joshua A. 2006

机译：在生物有机发光二极管中使用DNA电子阻挡层提高了发光效率和亮度。
6. Formation and Characterization of Hole Nanopattern on Photoresist Layer by Scanning Near-Field Optical Microscope [O] . Agata Roszkiewicz, Amrita Jain, Marian Teodorczyk, 2019

机译：扫描近场光学显微镜扫描光致抗蚀剂层孔纳米图的形成与表征
7. Use of a patterned current blocking layer to enhance the light output power of InGaN-based light-emitting diodes [O] . Jae-Seong Park, Young Hoon Sung, Jin-Young Na, 2017

机译：使用图案电流阻塞层以增强基于IngaN的发光二极管的光输出功率

A Patternable, Anti-Reflective Light Blocking Layer using a Nano-Particle Suspension in Photoresist

摘要

著录项

相似文献

相关主题

期刊订阅