THz sheet beam traveling wave tube amplifier for microwave power module (MPM) application: MEMS-fabrications and characteristic analysis

摘要

Terahertz vacuum electronic circuits require submillimeter features of a few microns to a few hundred microns, which pose significant challenges for conventional machining techniques due to tool size and fabrication tolerance requirements. Recently, MEMS techniques of nano CNC milling, lithography, etching, and deposition developed by the semiconductor industry have been applied to microfabrication and integration of vacuum electronic devices.